Fig. 1 | Metalens-based DLW lithography. Schematic diagrams of (a) the DLW lithography setup, (b) the metalens and its constructing unit cells. (c) The metalens in top view and cross-section view. (d) ...
In the global lithography industry dominated by ASML, Nikon, and Canon, Nikon expressed concerns about emerging challenges from China-based competitors. Save my User ID and Password Some subscribers ...
Modern photolithography machines must deliver extraordinary precision on a repeatable basis, and in high volume production. In response to demands for increased throughput in the semiconductor ...
These are the most-read DIGITIMES Asia stories in the week of April 1 - April 5. Nikon shows concerns about emerging Chinese competitors in lithography Chinese media reported that Masahiro Morita, ...